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雙溫區CVD管式梯度爐當前位置:首頁產品中心 > 雙溫區CVD管式梯度爐

FGL系列雙溫區-管式梯度爐(T max 1700℃和T max 1400)

FGL系列雙溫區-管式梯度爐專門設計用于有溫度梯度要求的CVD工藝。兩個溫區獨立控制,溫區可單獨使用。在同一腔體內實現不同的溫度差,是CVD工藝的專用理想設備。

特點

u 智能程序控溫儀控制精準、可編輯、儲存并調用多段程序

u 爐殼結構,雙層爐殼風冷結構

u 采用不銹鋼雙層密封法蘭,進、出氣配美標針閥

u 兩端可調節式法蘭支撐結構,延長剛玉管使用壽命

u 超溫保護功能,當溫度超過允許設定值自動斷電

u 安全保護當爐體漏電時自動斷電

u LED高強度抗破壞全不銹鋼按鈕,經久耐用


拓展選件:

u爐內測量系統:(氧含量檢測系統、溫度檢測系統)

u真空系統:(旋片式機械泵、擴散泵機組、分子泵機組)

u氣氛系統:(浮子流量計、質量流量計)

u監控系統:(溫度記錄儀、觸摸屏遠程監控)


技術參數:

設備型號

高溫

使用溫度

管徑

/低溫區長度

熱偶

電壓

功率

FGL-50/17/2

1700

高溫區溫度

1000-1600

低溫區溫度

RT-1000

50mm

200/200mm

B/S

220V

6.0KW

FGL-60/17/2

1700

60mm

200/200mm

B/S

220V

FGL-70/17/2

1700

70mm

200/200mm

B/S

220V

FGL-80/17/2

1700

80mm

200/200mm

B/S

220V

FGL-50/14/2

1400

高溫區溫度

RT-1300

低溫區溫度

RT-1000

50mm

200/200mm

S/K

220V

9.0KW

FGL-60/14/2

1400

60mm

200/200mm

S/K

220V

FGL-70/14/2

1400

70mm

200/200mm

S/K

220V

FGL-80/14/2

1400

80mm

200/200mm

S/K

220V

注:給出的最高溫度為工作管外測定,其它溫區個數和加熱區長度可根據客戶工藝要求定制。


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