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1100℃滑軌式管式爐當前位置:首頁產品中心 > 1100℃滑軌式管式爐

FGLRTP系列滑軌式管式爐(T max 1100)

滑軌管式爐一體化結構設計,用于1100℃以下快速升溫快速降溫的特殊工藝要求通過移動爐體實現快速冷卻的目的。同時也可以預先設定溫度,然后移動到樣品處,達到快速升溫的效果高純石英管作為爐膛,無污染,抗急冷急熱性能好。設備外形精巧美觀,周邊拓展性好,適合使用廣泛的RTP工藝及CVD石墨烯工藝。

特點

u 工作溫度RT1000

u 日本進口智能程序控溫儀控制精準、可編輯、儲存并調用多段程序

u 采用陶瓷纖維FEC加熱模塊,電阻絲內嵌式環繞加熱

u 爐殼結構,雙層爐殼風冷結構

u 不銹鋼雙層密封法蘭,進、出氣美標針閥

u 兩端可調節式法蘭支撐結構延長石英管的使用壽命

u 超溫保護功能,當溫度超過允許設定值自動斷電

u 安全保護當爐體漏電時自動斷電


額外選配:

u爐內測量系統:(氧含量檢測系統、溫度檢測系統)

u真空系統:(旋片式機械泵、擴散泵機組、分子泵機組)

u氣氛系統:(浮子流量計、質量流量計)

u監控系統:(溫度記錄儀、觸摸屏遠程監控)

注:選件需配置拓展柜體


技術參數:

設備型號

最高溫度

管徑

加熱區

溫區數

熱電偶類型

電壓

功率

FGL(RTP)-40/11/1

1100

40mm

320 mm

1

K

220V




3.0KW

FGL(RTP)-50/11/1

1100

50mm

320 mm

1

K

220V

FGL(RTP)-60/11/1

1100

60mm

320 mm

1

K

220V

FGL(RTP)-70/11/1

1100

70mm

320 mm

1

K

220V

FGL(RTP)-80/11/1

1100

80mm

320 mm

1

K

220V

注:給出的最高溫度為工作管外測定,其它溫區個數和加熱區長度可根據客戶工藝要求定制。


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